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We combine the world advanced production technology, strict production regulations, excellent production facilities and advance production process together to build up a reliable production base.

Automatic purewatertreatment station with reverse osmosis + ion exchange
At mean time, we have acquired advanced hot-forming furnaces to produce fused quartz ring. After two times of thermal forming, the bubbles contained in the quartz rings could be removed away greatly. By doing so, the homogenization and thermal stability performance is ensured, and thus the internal quality of the products are improved and the products may offer outstanding optical performance. The effective diameter of the furnaces is 420 mm. And we may manufacture quartz rings and target materials of all shapes and specs within the scope of effective diameter as per the requirements of the customers.
In the firing workshop, the whole firing process is control by imported programmable logic controller (PLC), and all the action are protected by interlocks. Imported thermal controllers are used to control the temperature, and thus realize automatic control over temperature-rising, -holding and –reducing. Process curve storage unit are employed as well, which may store several different process curves and monitors the firing process in all aspects. Thus a stable firing under high vacuum degree is obtained, and the residual air, vapor and other volatile impurities are eliminated. Therefore, the products reach high density, high purity and with little air absorbed, and they offer |
stable refractive index and high reproducible ability, good mechanic strength and optical performance. And the scattering phenomenon caused by particle splashing during plating due to bad quality of plating material.
Cleaning products in super- clean room
In order to ensure purity of products, we have purchased advanced automatic pure water treatment station with reverse osmosis + ion exchange, which is so precised that the purity degree of water produced by it ≥ 15 MΩ·cm and micro particle content < 0.2 μm. And ultra-sonic washing is used together with it. Those devices help to remove thoroughly the organic and inorganic impurities attached on the surface of the products, and thus guarantee the materials’ optical properties during vapour deposition, improve the cohesive force and get rid of splashes to the maximum extend, so the products are then suitable for precised optics.

Melting quartz rings and target materials in the hot-forming furnace

Auto-controlled vacuum firing equipment |